Thin Film Thickness Calculator

Film thickness from deposition rate and time, with optical properties.

Deposition Rate (nm/min)

Deposition Time (min)

Refractive Index (n)

Target Thickness (nm)

Tab to move between fields

Film Thickness (nm)

Time for Target (min)

100

Thickness (Å)600

Thickness (µm)0.06

Optical Path (nm)87.6

1st Order Color (nm)175.2

Atomic Layers200

Mass/Area (µg/cm²)13.2

Interference Wavelength287.6

How to Use This Calculator

Enter the deposition rate (nm/min) calibrated from a quartz crystal microbalance or profilometer measurement.
Set deposition time (min) and the film's refractive index (n) for optical path calculations.
Enter target thickness (nm) to calculate the required deposition time.
Review film thickness in nm, Å, and µm, plus optical path length (nm) for thin-film interference design.
Verify thickness after deposition with ellipsometry or profilometry to calibrate your deposition rate.

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