AFM Tip Convolution Calculator

Deconvolved feature width from AFM tip radius correction.

Tip Radius (nm)

Apparent Width (nm)

Feature Height (nm)

Scan Rate (Hz)

Tab to move between fields

Real Width (nm)

35.86

Tip Broadening (nm)

14.14

Broadening (%)28.3

Feature Aspect Ratio0.14

Tip Can Resolve? (1=Yes)1

Lateral Resolution (nm)1.41

Max Resolvable AR0.32

How to Use This Calculator

Enter the AFM tip radius (nm) from the manufacturer's specification or SEM measurement.
Enter the apparent (measured) feature width (nm) and feature height (nm) from your scan.
Set the scan rate (Hz) to check if tip velocity limits resolution for your sample.
Review the real (tip-deconvoluted) feature width, tip broadening (nm and %), and aspect ratio.
If broadening exceeds 30%, use a sharper tip (smaller radius) or apply tip deconvolution algorithms.

How the result changes with Apparent Width (nm)

Tip Radius (nm): AFM probe tip radius. Standard Si: 7-10 nm, worn: 20-50 nm.
Apparent Width (nm): Measured feature width from AFM image.
Feature Height (nm): Measured feature height from AFM.
Scan Rate (Hz): Line scan frequency.

Real Width (nm): Deconvolved true feature width.
Tip Broadening (nm): Width added by tip convolution: 2√(R·h).
Broadening (%): Broadening as percentage of apparent width.
Feature Aspect Ratio: Height / true width.
Tip Can Resolve? (1=Yes): Whether tip geometry allows faithful imaging.
Lateral Resolution (nm): Theoretical lateral resolution limit.
Max Resolvable AR: Maximum aspect ratio for standard Si tip (17.5° half-angle).

Identify Input Parameters
4 parameters
Tip Radius (nm) = 10, Apparent Width (nm) = 50, Feature Height (nm) = 5, Scan Rate (Hz) = 1 = 4 input(s) provided
Calculate Real Width
35.86 = 35.86
Calculate Tip Broadening
Tip Broadening = 2 * sqrt(tipRadiusNm * featureHeightNm)
14.14 = 14.14
Calculate Broadening
28.3 = 28.3
Calculate Feature Aspect Ratio
Feature Aspect Ratio = featureHeightNm / max(0.01, realWidth)
0.139 = 0.139